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National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Deposition of plasma polymer films
 Malá, Michaela ; Brablec, Antonín (referee) ; Čech, Vladimír (advisor)
This bachelor thesis is focused on the characterization and preparation of thin polymer layers deposited by plasma-enhanced chemical vapor deposition on silicon wafer. The main part of the work is a literature review about the plasma polymerization and methods of characterization of thin polymer layers. In the experimental section were prepared thin layers of polymer from the monomer vapor of tetravinylsilane. Prepared thin films were characterized by microscopic and spectroscopic techniques. The physical and chemical properties of deposited films were studied with respect to the deposition conditions in low-temperature plasma.
Detailed record
Deposition of plasma polymer films
 Malá, Michaela ; Brablec, Antonín (referee) ; Čech, Vladimír (advisor)
This bachelor thesis is focused on the characterization and preparation of thin polymer layers deposited by plasma-enhanced chemical vapor deposition on silicon wafer. The main part of the work is a literature review about the plasma polymerization and methods of characterization of thin polymer layers. In the experimental section were prepared thin layers of polymer from the monomer vapor of tetravinylsilane. Prepared thin films were characterized by microscopic and spectroscopic techniques. The physical and chemical properties of deposited films were studied with respect to the deposition conditions in low-temperature plasma.
Detailed record

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